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Educational & Professional | 10 Chapters
Author: Dr. P. Elamurugan
This book aims to fortify the student clear knowledge an understanding of the fundamentals of Electrical, Electronics and their applications in Instrumentation Engineering. The book will also serve as a prerequisite for post graduate and specialized studies and research. This prologue to micro integrated system accentuate on applications in Electrical Electronics and Instrumentation Engineering. The book travel around the liaison between fundamen....
Dedicated to my family
Chapter 1 deals with introduction .Chapter 2 describes the sensors and actuators for industrial applications using temperature sensnsors.Chapter 3 describes the sensors and actuators for industrial applications using pressure sensnsors.chapter 4 explains the micromaching and chapter 5 discusses the applications of optical mems
CHAPTER I INTRODUCTION
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.
CHAPTER II SENSORS AND ACTUATORS-I
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys.
CHAPTER III SENSORS AND ACTUATORS-II
Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.
CHAPTER IV MICROMACHINING
Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants– Case studies –Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.
CHAPTER V POLYMER AND OPTICAL MEMS
Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors-Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.
Educational & Professional | 10 Chapters
Author: Dr. P. Elamurugan
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Micro Electro Mechanical Systems
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